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S. Chevalliez
S. Chevalliez
Sofradir
Materials science
Silicon
Eutectic system
Engineering
Vacuum chamber
4
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11
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Nanosecond Laser Anneal (NLA) for Si-implanted HfO2 Ferroelectric Memories Integrated in Back-End Of Line (BEOL)
2020
VLSIT | Symposium on VLSI Technology
Laurent Grenouillet
T. François
J. Coignus
S. Kerdiles
N. Vaxelaire
C. Carabasse
Furqan Mehmood
S. Chevalliez
C. Pellissier
F. Triozon
Frédéric Mazen
G. Rodriguez
T. Magis
Viktor Havel
Stefan Slesazeck
F. Gaillard
Uwe Schroeder
T. Mikolajick
E. Nowak
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Citations (5)
A review of the full 500°C low temperature technological modules development for high performance and reliable 3D Sequential Integration
2019
IEEE Electron Devices Technology and Manufacturing Conference
C. Fenouillet-Beranger
L. Brunet
P. Batude
F. Andrieu
J. Micout
Bernard Previtali
J.M. Pedini
V. Mazzocchi
P. Acosta Alba
S. Kerdiles
V. Beugin
C. Guerin
C. Vizioz
F. Ponthenier
N. Rambal
Mikael Casse
X. Garros
S. Chevalliez
F. Aussenac
M. Vinet
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Citations (2)
Low temperature FIB cross section: Application to indium micro bumps
2014
Microelectronics Reliability
L. Dantas de Morais
S. Chevalliez
S. Mouleres
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Citations (4)
1