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G. Murdoch
G. Murdoch
IMEC
Dielectric
Materials science
Electronic engineering
Copper interconnect
Chemical-mechanical planarization
2
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1
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Toward successful integration of gap-filling ultralow-k dielectrics
2016
IITC | International Interconnect Technology Conference
L. Zhang
J.-F. de Marneffe
Alicja Lesniewska
P. Verdonck
Nancy Heylen
G. Murdoch
Kristof Croes
Zs. Tokei
Jürgen Bömmels
S. Lefferts
S. De Gendt
Mikhail R. Baklanov
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Alternative integration of ultralow-k dielectrics by template replacement approach
2015
IITC | International Interconnect Technology Conference
L. Zhang
J.-F. de Marneffe
Nancy Heylen
G. Murdoch
Zsolt Tokei
J. Boemmels
S. De Gendt
Mikhail R. Baklanov
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