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Zs. Tokei
Zs. Tokei
IMEC
Materials science
Dielectric
Electronic engineering
Scaling
Metallurgy
5
Papers
23
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Toward successful integration of gap-filling ultralow-k dielectrics
2016
IITC | International Interconnect Technology Conference
L. Zhang
J.-F. de Marneffe
Alicja Lesniewska
P. Verdonck
Nancy Heylen
G. Murdoch
Kristof Croes
Zs. Tokei
Jürgen Bömmels
S. Lefferts
S. De Gendt
Mikhail R. Baklanov
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Reliability mechanisms and lifetime extrapolation methods for scaled interconnect technologies
2015
IITC | International Interconnect Technology Conference
Kristof Croes
C. Wu
D. Kocaay
Jürgen Bömmels
Zs. Tokei
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Citations (2)
Evaluating k-values for low-k materials after damascene integration: Method and results
2011
Microelectronic Engineering
B. Vereecke
Marianna Pantouvaki
Ivan Ciofi
Gerald Beyer
Zs. Tokei
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Increasing the mean grain size in copper films and features
2008
Journal of Materials Research
Kris Vanstreels
Sywert H. Brongersma
Zs. Tokei
L. Carbonell
W. De Ceuninck
J. D’Haen
M. D’Olieslaeger
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Citations (12)
Impact of Cu contacts on front-end performance: a projection towards 22nm node
2006
IITC | International Interconnect Technology Conference
S. Demuynck
Axel Nackaerts
G. Van den bosch
T. Chiarella
J. Ramos
Zs. Tokei
Jan Vaes
Nancy Heylen
Gerald Beyer
M. Van Hove
T. Mandrekar
R. Schreutelkamp
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Citations (6)
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