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Hideaki Nishino
Hideaki Nishino
Toshiba
Reticle
Photolithography
Miniaturization
Photomask
Optics
2
Papers
4
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1nm of local CD accuracy for 45nm-node photomask with low sensitivity CAR for e-beam writer
2007
Kunihiro Ugajin
Masato Saito
Machiko Suenaga
Tomotaka Higaki
Hideaki Nishino
Hidehiro Watanabe
Osamu Ikenaga
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Higher current density operation with EB reticle writer EBM-5000
2006
Masato Saito
Kunihiro Ugajin
Tomotaka Higaki
Hideaki Nishino
Hidehiro Watanabe
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