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Daniel Chalom
Daniel Chalom
Photronics, Inc.
Photolithography
Wafer
Lithography
Beam (structure)
Optical proximity correction
4
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Robustness improvement in imaging based overlay metrology for high topography layers by Talbot targets
2021
Brian R. Watson
Shlomit Katz
Richard T. Housley
Kar Wui Thong
Roy Nikhil Aditya Kumar
Yoav Grauer
Diana Shapirov
Raviv Yohanan
Greg Gray
Yonglei Li
Daniel Chalom
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Mask manufacturing of advanced technology designs using multi-beam lithography (Part 1)
2016
Michael Green
Young Ham
Brian Dillon
Bryan S. Kasprowicz
Ik Boum Hur
Joong Hee Park
Yohan Choi
Jeff McMurran
Henry Kamberian
Daniel Chalom
Jan Klikovits
Michal Jurkovic
Peter Hudek
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Mask manufacturing of advanced technology designs using multi-beam lithography (part 2)
2016
Michael Green
Young Ham
Brian Dillon
Bryan S. Kasprowicz
Ik Boum Hur
Joong Hee Park
Yohan Choi
Jeff McMurran
Henry Kamberian
Daniel Chalom
Jan Klikovits
Michal Jurkovic
Peter Hudek
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Haze growth on reticles: What's the RigHT thing to do?
2009
Steven M. McDonald
Daniel Chalom
Michael Green
Jeffrey A. McMurran
Michael B. Garrett
David W. Dlouhy
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