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Brian R. Watson
Brian R. Watson
Micron Technology
Optics
Metrology
Computer science
Overlay
Robustness (computer science)
2
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2024
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Novel diffraction based overlay metrology utilizing phase-based overlay for improved robustness
2021
Masazumi Matsunobu
Toshiharu Nishiyama
michio Inoue
Richard T. Housley
Bozdog Cornel
Justin Lim
Brian R. Watson
Jason Reece
Steve McCandless
Olger Victor Zwier
Maurits van der Schaar
Murat Bozkurt
Masudur al Arif
Elliott McNamara
Pieter Kapel
Alan Khan
Simon Strom
Paul Turner
Ping Olson
Ewoud van West
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Robustness improvement in imaging based overlay metrology for high topography layers by Talbot targets
2021
Brian R. Watson
Shlomit Katz
Richard T. Housley
Kar Wui Thong
Roy Nikhil Aditya Kumar
Yoav Grauer
Diana Shapirov
Raviv Yohanan
Greg Gray
Yonglei Li
Daniel Chalom
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