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Richard T. Housley
Richard T. Housley
Micron Technology
Immersion lithography
Lithography
Photolithography
Optics
Metrology
4
Papers
18
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Novel diffraction based overlay metrology utilizing phase-based overlay for improved robustness
2021
Masazumi Matsunobu
Toshiharu Nishiyama
michio Inoue
Richard T. Housley
Bozdog Cornel
Justin Lim
Brian R. Watson
Jason Reece
Steve McCandless
Olger Victor Zwier
Maurits van der Schaar
Murat Bozkurt
Masudur al Arif
Elliott McNamara
Pieter Kapel
Alan Khan
Simon Strom
Paul Turner
Ping Olson
Ewoud van West
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Robustness improvement in imaging based overlay metrology for high topography layers by Talbot targets
2021
Brian R. Watson
Shlomit Katz
Richard T. Housley
Kar Wui Thong
Roy Nikhil Aditya Kumar
Yoav Grauer
Diana Shapirov
Raviv Yohanan
Greg Gray
Yonglei Li
Daniel Chalom
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Selection and evaluation of developer-soluble topcoat for 193nm immersion lithography
2006
Yayi Wei
Karen Petrillo
Stefan Brandl
Frank Goodwin
Peter A. Benson
Richard T. Housley
Uzodinma Okoroanyanwu
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Citations (12)
A year in the life of an immersion lithography alpha tool at Albany NanoTech
2006
Michael Tittnich
John G. Hartley
G. Denbeaux
Uzo Okoroanyanwu
Harry J. Levinson
Karen Petrillo
Christopher F. Robinson
Dario Gil
Dan Corliss
David Back
Stefan Brandl
Christian Schwarz
Frank Goodwin
Yayi Wei
Brian Martinick
Richard T. Housley
Peter A. Benson
Kevin Cummings
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Citations (6)
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