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Christian Schwarz
Christian Schwarz
Infineon Technologies
Immersion lithography
Lithography
Microprocessor
IBM
Engineering
2
Papers
6
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A year in the life of an immersion lithography alpha tool at Albany NanoTech
2006
Michael Tittnich
John G. Hartley
G. Denbeaux
Uzo Okoroanyanwu
Harry J. Levinson
Karen Petrillo
Christopher F. Robinson
Dario Gil
Dan Corliss
David Back
Stefan Brandl
Christian Schwarz
Frank Goodwin
Yayi Wei
Brian Martinick
Richard T. Housley
Peter A. Benson
Kevin Cummings
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Citations (6)
A year in the life of immersion lithography at Albany Nanotech
2006
Michael Tittnich
John G. Hartley
Greg Denbeaux
Uzo Okoroanyanwu
Harry J. Levinson
Karen Petrillo
Christopher F. Robinson
Dario Gil
Dan Corliss
David Back
Stefan Brandl
Christian Schwarz
Frank Goodwin
Yayi Wei
Brian Martinick
Richard Housley
Peter A. Benson
Kevin Cummings
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Source
Cite
Save
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