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Uzo Okoroanyanwu
Uzo Okoroanyanwu
Advanced Micro Devices
Lithography
Immersion lithography
Microprocessor
IBM
Engineering
3
Papers
14
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An Investigation of EUV Lithography Defectivity
2008
Kevin Cummings
Thomas Laursen
Bill Pierson
Sang-In Han
Robert Watso
Youri van Dommelen
Brian Lee
Yunfei Deng
Bruno La Fontaine
Thomas Wallow
Uzo Okoroanyanwu
Obert Wood
Anna Tchikoulaeva
Christian Holfeld
Jan Hendrick Peters
Chiew-seng Koay
Karen Petrillo
Tony DiBiase
Sumanth Kini
Hiroyuki Mizuno
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Citations (8)
A year in the life of an immersion lithography alpha tool at Albany NanoTech
2006
Michael Tittnich
John G. Hartley
G. Denbeaux
Uzo Okoroanyanwu
Harry J. Levinson
Karen Petrillo
Christopher F. Robinson
Dario Gil
Dan Corliss
David Back
Stefan Brandl
Christian Schwarz
Frank Goodwin
Yayi Wei
Brian Martinick
Richard T. Housley
Peter A. Benson
Kevin Cummings
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Citations (6)
A year in the life of immersion lithography at Albany Nanotech
2006
Michael Tittnich
John G. Hartley
Greg Denbeaux
Uzo Okoroanyanwu
Harry J. Levinson
Karen Petrillo
Christopher F. Robinson
Dario Gil
Dan Corliss
David Back
Stefan Brandl
Christian Schwarz
Frank Goodwin
Yayi Wei
Brian Martinick
Richard Housley
Peter A. Benson
Kevin Cummings
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