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Peter A. Benson
Peter A. Benson
Micron Technology
Manufacturing engineering
Engineering
Immersion lithography
Lithography
Microprocessor
5
Papers
18
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Selection and evaluation of developer-soluble topcoat for 193nm immersion lithography
2006
Yayi Wei
Karen Petrillo
Stefan Brandl
Frank Goodwin
Peter A. Benson
Richard T. Housley
Uzodinma Okoroanyanwu
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Citations (12)
A year in the life of an immersion lithography alpha tool at Albany NanoTech
2006
Michael Tittnich
John G. Hartley
G. Denbeaux
Uzo Okoroanyanwu
Harry J. Levinson
Karen Petrillo
Christopher F. Robinson
Dario Gil
Dan Corliss
David Back
Stefan Brandl
Christian Schwarz
Frank Goodwin
Yayi Wei
Brian Martinick
Richard T. Housley
Peter A. Benson
Kevin Cummings
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Citations (6)
A year in the life of immersion lithography at Albany Nanotech
2006
Michael Tittnich
John G. Hartley
Greg Denbeaux
Uzo Okoroanyanwu
Harry J. Levinson
Karen Petrillo
Christopher F. Robinson
Dario Gil
Dan Corliss
David Back
Stefan Brandl
Christian Schwarz
Frank Goodwin
Yayi Wei
Brian Martinick
Richard Housley
Peter A. Benson
Kevin Cummings
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System and method for programmable consolidation of materials
2003
Warren M. Farnworth
William M. Hiatt
David R. Hembree
Peter A. Benson
Syed Sajid Ahmad
Michael E. Hess
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Systeme de manipulation s'utilisant avec des systemes programmables de consolidation de matiere et procedes associes
2003
Syed Sajid Ahmad
Peter A. Benson
Warren M. Farnworth
David R. Hembree
Michael E. Hess
William M. Hiatt
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