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Prabhat Kumar
Prabhat Kumar
Lam Research
layer
Etching (microfabrication)
Materials science
Infrared spectroscopy
Chemical engineering
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Selective functionalization of partially etched SiNx to enhance SiO2 to SiNx etch selectivity
2021
Journal of Vacuum Science and Technology
Ryan J. Gasvoda
Xue Wang
Prabhat Kumar
Eric Hudson
Sumit Agarwal
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