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François Martin
François Martin
Materials science
Analytical chemistry
X-ray reflectivity
X-ray photoelectron spectroscopy
Atomic layer deposition
4
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47
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Evaluation of plasma parameters on PEALD deposited TaCN
2013
Microelectronic Engineering
Fabien Piallat
Virginie Beugin
Remy Gassilloud
Philippe Michallon
Laurent Dussault
B. Pelissier
Timo Asikainen
Jan Willem Maes
François Martin
Pierre Morin
C. Vallée
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Citations (7)
Characterization of the annealing impact on La2O3/HfO2 and HfO2/La2O3 stacks for MOS applications
2010
Microelectronic Engineering
D. Rébiscoul
S. Favier
Jean-Paul Barnes
J. W. Maes
François Martin
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Citations (13)
A method of making a conductive electrode
2010
Remy Gassilloud
François Martin
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Parallel angle resolved XPS investigations on 12in. wafers for the study of W and WSix oxidation in air
2008
Microelectronic Engineering
B. Pelissier
A. Beaurain
J P Barnes
Remy Gassilloud
François Martin
O. Joubert
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Citations (27)
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