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Juan Carlos Rocha
Juan Carlos Rocha
Applied Materials
Dielectric
Materials science
Porosity
Copper interconnect
Annealing (metallurgy)
2
Papers
7
Citations
0
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Restoration and pore sealing of low-k films by UV-assisted processes
2014
IITC | International Interconnect Technology Conference
Bo Xie
Kelvin Chan
David Cui
He Ren
Daemian Raj
Eric Hollar
Sanjeev Baluja
Juan Carlos Rocha
Mehul Naik
Alex Demos
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Citations (2)
Development and optimization of porous pSiCOH interconnect dielectrics for 45 nm and beyond
2008
IITC | International Interconnect Technology Conference
Alfred Grill
Stephen M. Gates
Christos D. Dimitrakopoulos
Vishnubhai Vitthalbhai Patel
S. Cohen
Y. Ostrovski
E. Liniger
Eva E. Simonyi
Darryl D. Restaino
S. Sankaran
Steven Reiter
Alex Demos
Kang Sub Yim
Vu Ngoc Tran Nguyen
Juan Carlos Rocha
Dustin W. Ho
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Citations (5)
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