Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics

Recent advances in integration of Nano-Opto-Electromechanical Systems in Silicon Photonics enable fundamental photonic operations such as switching, phase shifting or power equalization on-chip. The unique combination of high optical efficiency, low electric power consumption and compact footprint, provides outstanding opportunities in scalability to large-scale photonic integrated circuits.