Layered Nanoassem bly of Three-Dimensional Structures

Basic Process NEMS (nanoelectromechanical systems) loom beyond the MEMS horizon as the new frontier in miniaturization. Nanorobots and other NEMS are expected to find revolutionary applications in science, engineering and everyday life. Until now, nanostructures have been built primarily in two dimensions, because of the difficulties of threedimensional (3-D) fabrication. This paper describes a promising approach to the construction of 3-D nanostructures by working in successive layers, much like the rapid prototyping techniques used in the macroscopic world. Each object nanolayer is built by nanomanipulation, or possibly by programmed selfassembly, and then surrounded by a sacrificial layer that planarizes the sample and serves as a substrate for the deposition of the next object nanolayer. Initial experimental results which show that the approach is feasible are presented.