Bio and Nano Packaging Techniques for Electron Devices: Advances in Electronic Device Packaging

Gerald Gerlach,Klaus-Jurgen Wolter

Bio and Nano Packaging Techniques for Electron Devices: Advances in Electronic Device Packaging

2012

Gerald Gerlach
Klaus-Jurgen Wolter

General Aspects.- 3D Modelling and Design for Nems.- Nanoparticles.- Nanopatterning.- Metallization.- Nano- and Bio-Functionalized Surfaces.- Biocompatible Packaging.- Thermal Management.- System-In-Package For Mems and Moems.

Keywords:

Nanotechnology
Nanoelectromechanical systems
Nanoparticle
Nano-
Thermal management of electronic devices and systems
Microelectromechanical systems
Materials science
Biocompatible material

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