Old Web
English
Sign In
Acemap
>
Paper
>
Surface analysis in the semiconductor industry: Present use and future possibilities
Surface analysis in the semiconductor industry: Present use and future possibilities
2020
Paul van der Heide
Valentina Spampinato
Alexis Franquet
Charlotte Zborowski
Thierry Conard
Jonathan Ludwig
Kristof Paredis
Wilfried Vandervorst
Alexander Pirkl
Ewald Niehuis
Keywords:
semiconductor industry
Nanotechnology
Inorganic chemistry
Chemistry
X-ray photoelectron spectroscopy
Correction
Source
Cite
Save
Machine Reading By IdeaReader
13
References
0
Citations
NaN
KQI
[]