Study of Design Parameters in Hydrogen Microsensors Integrated With Metal Semiconductor Nanoparticles

We investigated the effect of electrode design parameters on the performance of hydrogen microsensors. The sensors with varying electrode parameters were fabricated integrating micromachined interdigitated electrodes with indium oxide (In2 O3 ) doped polycrystalline tin dioxide (SnO2 ) nanoparticles and tested in a controlled gas environment. It was observed that the sensitivity was closely related to the gap between, and a ratio of the gap to the width in interdigitated electrodes (IDE).Copyright © 2007 by ASME