Monocrystal silicon cleaning liquid and precleaning process

2010 
The invention provides a monocrystal silicon cleaning liquid and a precleaning process. The monocrystal silicon cleaning liquid is characterized by comprising alkali, hydrogen peroxide and water. The precleaning process of the monocrystal silicon cleaning liquid is characterized by comprising the following concrete steps: blending the sodium hydroxide; hydrogen peroxide and water according to a certain proportion to prepare the monocrystal silicon cleaning liquid; heating to 60-80 DEG C; and cleaning the original silicon chips in the monocrystal silicon cleaning liquid. The invention has the advantages of favorable cleaning effect and stability, nonvolatility and lowered production cost.
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