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Gordon Yue
Gordon Yue
Materials science
Coolant
Thermal management of electronic devices and systems
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Optics
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Thermal management systems and arrangements for grazing incidence collectors for EUV lithography and EUV lithography system
2012
Giovanni Bianucci
Fabio Zocchi
Robert Banham
Marco Pedrali
Daniel G. Stearns
Richard Levesque
Gordon Yue
Boris Grek
Natale M. Ceglio
Dean Shough
Guiseppe Valsecchi
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Thermal management systems, arrangements and procedures for collectors grazing incidence for EUV lithography
2012
Robert Banham
Giovanni Bianucci
Natale M. Ceglio
Boris Grek
Richard Levesque
Marco Pedrali
Dean Shough
Daniel G. Stearns
Guiseppe Valsecchi
Gordon Yue
Fabio Zocchi
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Voltage decoupling apparatus and method for chilled mirror systems
2011
Giovanni Bianucci
Gian Luca Cassol
Stefano Moretti
Gordon Yue
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