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Marco Pedrali
Marco Pedrali
Materials science
Coolant
Optics
Extreme ultraviolet lithography
Casing
4
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Electroless deposition of ruthenium for interconnects
2017
Marco Pedrali
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Thermal management systems and arrangements for grazing incidence collectors for EUV lithography and EUV lithography system
2012
Giovanni Bianucci
Fabio Zocchi
Robert Banham
Marco Pedrali
Daniel G. Stearns
Richard Levesque
Gordon Yue
Boris Grek
Natale M. Ceglio
Dean Shough
Guiseppe Valsecchi
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Thermal management systems, arrangements and procedures for collectors grazing incidence for EUV lithography
2012
Robert Banham
Giovanni Bianucci
Natale M. Ceglio
Boris Grek
Richard Levesque
Marco Pedrali
Dean Shough
Daniel G. Stearns
Guiseppe Valsecchi
Gordon Yue
Fabio Zocchi
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Cooling systems and methods for EUV lithography grazing incidence collectors
2010
Riccardo Ghislanzoni
Marco Pedrali
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