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Jim McWhirter
Jim McWhirter
Ultratech, Inc.
Annealing (metallurgy)
Millisecond
Materials science
Analytical chemistry
Dwell time
2
Papers
5
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0
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Laser spike annealing for nickel silicide formation
2011
ASMC | Advanced Semiconductor Manufacturing Conference
Jeffrey Hebb
Yun Wang
Shrinivas Shetty
Jim McWhirter
David M. Owen
Michael Shen
Van Le
Jeffrey Mileham
David Gaines
Serguei Anikitchev
Shaoyin Chen
Paul M. Bischoff
Joe Lee
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Citations (4)
Characterization of dopant activation, mobility and diffusion in advanced millisecond laser spike annealing
2010
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Shaoyin Chen
Xiaoru Wang
Michael O. Thompson
Yun Wang
Cam Lu
Jim McWhirter
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Citations (1)
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