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Serguei Anikitchev
Serguei Anikitchev
Ultratech, Inc.
Optoelectronics
Annealing (metallurgy)
Laser
Wafer
Millisecond
2
Papers
4
Citations
0
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Laserausheil- or -annealingsysteme and method with ultra-short dwell or holding times
2013
Andrew M. Hawryluk
Serguei Anikitchev
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Laser spike annealing for nickel silicide formation
2011
ASMC | Advanced Semiconductor Manufacturing Conference
Jeffrey Hebb
Yun Wang
Shrinivas Shetty
Jim McWhirter
David M. Owen
Michael Shen
Van Le
Jeffrey Mileham
David Gaines
Serguei Anikitchev
Shaoyin Chen
Paul M. Bischoff
Joe Lee
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Citations (4)
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