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David Gaines
David Gaines
Ultratech, Inc.
Annealing (metallurgy)
Laser
Millisecond
Temperature measurement
Wafer
2
Papers
7
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0
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Laser spike annealing for nickel silicide formation
2011
ASMC | Advanced Semiconductor Manufacturing Conference
Jeffrey Hebb
Yun Wang
Shrinivas Shetty
Jim McWhirter
David M. Owen
Michael Shen
Van Le
Jeffrey Mileham
David Gaines
Serguei Anikitchev
Shaoyin Chen
Paul M. Bischoff
Joe Lee
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Citations (4)
Emission feedback control system for sub-millisecond laser spike anneal
2008
RTP | International Conference on Advanced Thermal Processing of Semiconductors
James T. McWhirter
David Gaines
Paolo Zambon
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Citations (3)
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