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Rafal Dylewicz
Rafal Dylewicz
Lam Research
Wafer
Optoelectronics
Materials science
Electrical engineering
Electronic engineering
3
Papers
6
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Review on recent progress in patterning phase change materials
2020
Journal of Vacuum Science and Technology
Meihua Shen
Thorsten Lill
Nick Altieri
John Hoang
Steven Chiou
Jim Sims
Andrew John Mckerrow
Rafal Dylewicz
Ernest Chen
Hamid Razavi
Jane P. Chang
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Effect of VUV Lamp on Wafer Charging by Single-Wafer Wet Clean
2017
Ken-ichi Sano
Rafal Dylewicz
Xia Man
David Lou
Ji Zhu
Greg Harm
Mark Kawaguchi
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Minimizing Wafer Surface Charging for Single-Wafer Wet Cleaning for 10 nm and beyond
2016
Solid State Phenomena
Ken-ichi Sano
Rafal Dylewicz
Xia Man
David Mui
Ji Zhu
Mark Kawaguchi
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Citations (1)
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