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Herman Heijmerikx
Herman Heijmerikx
ASML Holding
Electronic engineering
Overlay
Metrology
Computer science
Throughput
2
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2024
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Accuracy aware pixel selection in multi-wavelength uDBO metrology enables higher robustness and accuracy for DRAM
2021
Chia Hung Chen
Sheng-Tsung Tsao
Jie Du
Wenkang Song
Hongwei Zhu
Ji-Ling Hou
Longfei Shen
Sunny Xia
Simon Gijsbert Josephus Mathijssen
Marc Noot
Farzad Farhadzadeh
Kimi Yang
Xing Ma
Zhi-Qiang Tang
Jing Wang
Yu Liu
David Xu
Herman Heijmerikx
Eason Su
Elliott Mc Namara
Kaustuve Bhattacharyya
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Enhancing the applications space of diffraction based overlay metrology by increasing throughput and target pitch flexibility
2020
Simon Gijsbert Josephus Mathijssen
Herman Heijmerikx
Farzad Farhadzadeh
Marc Noot
Lineke van der Sneppen
Longfei Shen
Fei Jia
Jolly Xu
Huajun Qin
Arie Jeffrey Den Boef
Elliott McNamara
Kaustuve Bhattacharyya
Chao Fang
Yaobin Feng
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