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Simon Gijsbert Josephus Mathijssen
Simon Gijsbert Josephus Mathijssen
ASML Holding
Electronic engineering
Overlay
Metrology
Computer science
Diffraction
4
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2024
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Accuracy aware pixel selection in multi-wavelength uDBO metrology enables higher robustness and accuracy for DRAM
2021
Chia Hung Chen
Sheng-Tsung Tsao
Jie Du
Wenkang Song
Hongwei Zhu
Ji-Ling Hou
Longfei Shen
Sunny Xia
Simon Gijsbert Josephus Mathijssen
Marc Noot
Farzad Farhadzadeh
Kimi Yang
Xing Ma
Zhi-Qiang Tang
Jing Wang
Yu Liu
David Xu
Herman Heijmerikx
Eason Su
Elliott Mc Namara
Kaustuve Bhattacharyya
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Fundamental understanding of the interplay between target and sensor brings diffraction based overlay to the next level of accuracy
2021
Simon Gijsbert Josephus Mathijssen
Davis Timothy Dugan
Arie Jeffrey Den Boef
Kaustuve Bhattacharyya
William T Blanton
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Enhancing the applications space of diffraction based overlay metrology by increasing throughput and target pitch flexibility
2020
Simon Gijsbert Josephus Mathijssen
Herman Heijmerikx
Farzad Farhadzadeh
Marc Noot
Lineke van der Sneppen
Longfei Shen
Fei Jia
Jolly Xu
Huajun Qin
Arie Jeffrey Den Boef
Elliott McNamara
Kaustuve Bhattacharyya
Chao Fang
Yaobin Feng
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Taking the multi-wavelength DBO to the next level of accuracy and robustness
2020
Jinsun Kim
Jeongijn Lee
Chan Hwang
Seung-yoon Lee
Woo-young Jung
Joon-Soo Park
Kaustuve Bhattacharyya
Arie Jeffrey Den Boef
Simon Gijsbert Josephus Mathijssen
Marc Noot
Farzad Farhadzadeh
Daniel Park
Kaustubh Padhye
Se-Ra Jeon
Seung-Bin Yang
Won-Jae Jang
Oh-Sung Kwon
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