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Kimi Yang
Kimi Yang
ASML Holding
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Computer science
Semiconductor device fabrication
Thin film
Excursion
2
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2024
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Accuracy aware pixel selection in multi-wavelength uDBO metrology enables higher robustness and accuracy for DRAM
2021
Chia Hung Chen
Sheng-Tsung Tsao
Jie Du
Wenkang Song
Hongwei Zhu
Ji-Ling Hou
Longfei Shen
Sunny Xia
Simon Gijsbert Josephus Mathijssen
Marc Noot
Farzad Farhadzadeh
Kimi Yang
Xing Ma
Zhi-Qiang Tang
Jing Wang
Yu Liu
David Xu
Herman Heijmerikx
Eason Su
Elliott Mc Namara
Kaustuve Bhattacharyya
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Real time process monitoring using diffraction-based overlay measurements from YieldStar
2020
Henry Chen
Jimmy Chang
Sheng-Tsung Tsao
Junjun Zhang
Jie Du
Congcong Fan
Alex Huang
David Xu
Sam Liu
Liang Wu
Kimi Yang
Ning Gu
Liping Ren
Jian Wu
Alexander Tan
Sunny Xia
Ivan Mao
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