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Sheng-Tsung Tsao
Sheng-Tsung Tsao
Computer science
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Dram
Electronic engineering
Robustness (computer science)
5
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Accuracy aware pixel selection in multi-wavelength uDBO metrology enables higher robustness and accuracy for DRAM
2021
Chia Hung Chen
Sheng-Tsung Tsao
Jie Du
Wenkang Song
Hongwei Zhu
Ji-Ling Hou
Longfei Shen
Sunny Xia
Simon Gijsbert Josephus Mathijssen
Marc Noot
Farzad Farhadzadeh
Kimi Yang
Xing Ma
Zhi-Qiang Tang
Jing Wang
Yu Liu
David Xu
Herman Heijmerikx
Eason Su
Elliott Mc Namara
Kaustuve Bhattacharyya
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Saving scribe-lane space by using narrow alignment marks
2020
Henry Chen
Sheng-Tsung Tsao
Congcong Fan
Jie Du
Richer Yang
Asei Chou
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Real time process monitoring using diffraction-based overlay measurements from YieldStar
2020
Henry Chen
Jimmy Chang
Sheng-Tsung Tsao
Junjun Zhang
Jie Du
Congcong Fan
Alex Huang
David Xu
Sam Liu
Liang Wu
Kimi Yang
Ning Gu
Liping Ren
Jian Wu
Alexander Tan
Sunny Xia
Ivan Mao
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New improving metrology for advanced memory devices with high transmission attenuated phase shift mask
2020
Henry Chen
Sheng-Tsung Tsao
Congcong Fan
Jie Du
Richer Yang
Asei Chou
KunYuan Chen
Jimmy Chang
Junjun Zhang
Wallace He
Leslie Zhang
Yunsheng Xia
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Robust alignment mark design for DRAM using a holistic computational approach
2019
Danying Li
Stella Zhang
Chia-Huang Chen
Youping Zhang
Alex Huang
David Xu
Yufeng Wang
Zhen Shi
Shi-Lu Wang
Sheng-Tsung Tsao
Angmar Li
Andy Yang
Junwei Lu
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