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Ji-Ling Hou
Ji-Ling Hou
ASML Holding
Metrology
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Electronic engineering
Computer science
Robustness (computer science)
2
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2024
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Accuracy aware pixel selection in multi-wavelength uDBO metrology enables higher robustness and accuracy for DRAM
2021
Chia Hung Chen
Sheng-Tsung Tsao
Jie Du
Wenkang Song
Hongwei Zhu
Ji-Ling Hou
Longfei Shen
Sunny Xia
Simon Gijsbert Josephus Mathijssen
Marc Noot
Farzad Farhadzadeh
Kimi Yang
Xing Ma
Zhi-Qiang Tang
Jing Wang
Yu Liu
David Xu
Herman Heijmerikx
Eason Su
Elliott Mc Namara
Kaustuve Bhattacharyya
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An accurate and robust after-develop overlay measurement solution using YieldStar multi-wavelength optical metrology accompanied by a precise application strategy
2021
Pengzhen Zhang
Kai-you
Pandeng Xuan
Yaobin Feng
Longfei Shen
Jolly Xu
Ji-Ling Hou
Saravana Prakash Shanmugasundaram
Summer Sui
Shiwei Ren
Chengkun Li
Jerry Fang
Toby Yu
Babak Mozooni
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